Fabrication of low-loss ridge waveguides in z-cut lithium niobate by combination of ion implantation and UV picosecond laser micromachinin
M. Stolze, T. Herrmann, J. A. L’huillier, Proc. SPIE 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX, 97590E (14 March 2016), doi: 10.1117/12.2212497