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Fundamental investigations of ultrashort-pulse micromachining of different types of crystalline lithium niobate

M. Stolze, T. Herrmann, J. A. L’huillier, Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350O (14 March 2016), doi: 10.1117/12.2212531